Published February 15, 2007
| Version v1
Journal article
IR and SIMS studies in 70% SiC-C films of hydrogen introduced with different methods
Creators
- 1. Key Laboratory For Radiation Physics and Technology of Education Ministry, Institute of Nuclear Science and Technology, Sichuan University, Chengdu, 610064 (China)
Description
70% SiC-C films were prepared with magnetron sputtering deposition followed by Ar+ ion bombardment. Hydrogen was then introduced to these films with ion implantation and permeation techniques for a comparison. Infrared (IR) transmission measurements were performed to analyze the hydrogen-related vibrational states in carbon-carbide. And secondary ion mass spectrometry (SIMS) was also employed to analyze hydrogen depth profiles in these SiC-C films
Additional details
Identifiers
- DOI
- 10.1016/j.physb.2006.01.466;
- PII
- S0921-4526(06)00551-5;
Publishing Information
- Journal Title
- Physica. B, Condensed Matter
- Journal Volume
- 389
- Journal Issue
- 2
- Journal Page Range
- p. 207-212
- ISSN
- 0921-4526
- CODEN
- PHYBE3
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38084790
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ARGON IONS; CARBON; COMPARATIVE EVALUATIONS; DEPOSITION; DEPTH; FILMS; HYDROGEN; INFRARED SPECTRA; ION BEAMS; ION IMPLANTATION; ION MICROPROBE ANALYSIS; MASS SPECTROSCOPY; SILICON CARBIDES; SPUTTERING; VIBRATIONAL STATES
- Descriptors DEC
- BEAMS; CARBIDES; CARBON COMPOUNDS; CHARGED PARTICLES; CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; ENERGY LEVELS; EVALUATION; EXCITED STATES; IONS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NONMETALS; SILICON COMPOUNDS; SPECTRA; SPECTROSCOPY
Optional Information
- Copyright
- Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.