Measurement of ultra-thin windows of ion implanted silicon detectors with low energy proton beams

Silicon particle detectors have been fabricated by implantation of boron ions of keV-energies. Window thicknesses were derived from the variation of the detector current level with the angle of the incident proton beam. The precision of the measurments is about +-20 A. The thinnest window obtained so far is 340 A (Si). (Auth.)