RBS data processing. 1: Analysis of non-stoichiometric targets

A technique which allows the depth distribution of an N-elemental target composition from Rutherford backscattering spectra to be obtained is presented. Using this technique one can calculate the ratio of the atomic concentration of each element to the total atomic concentration at some depth. The depth scale is determined in atoms cm2. The contributions from all target constituents to the stopping of probe ions are taken into account. The stopping power is given by Bragg's rule. The individual RBS yields from N-1 constituents are required to apply the technique. (author)