Published May 1989 | Version v1
Report Restricted

Microwave plasma generation with slotted-line radiator structures

Description

Simple and economic production of plasma can be achieved over a wide range of plasma parameters by exciting electrodeless, slotted-line radiating structures with microwave power. These plasma sources, which originate from fusion research, are suitable for applications in both low-temperature and thermal plasma chemistry. (orig.)

Availability note (English)

MF available from INIS under the Report Number.

Files

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Additional details

Publishing Information

Imprint Pagination
12 p.
Report number
IPP--III/145

Conference

Title
9. international symposium on plasma chemistry (ISPC-9) and plasma equipment exhibition.
Dates
4-8 Sep 1989.
Place
Pugnochiuso (Italy).

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
21041133
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRON DENSITY; ELECTRON TEMPERATURE; MICROWAVE RADIATION; PLASMA JETS; PLASMA PRODUCTION; RADIATORS; SPATIAL DISTRIBUTION
Descriptors DEC
DISTRIBUTION; ELECTROMAGNETIC RADIATION; HEAT EXCHANGERS; RADIATIONS