Published December 1990 | Version v1
Report Open

Measurement of the thickness of a target deposited in a substrate

Description

Being based on the Elastic scattering and in the Energy losses that suffer a projectile to the interacting with the matter, a method that allows to determine the thickness of a target deposited in a more heavy substrate is presented. The obtained results are consistent with that waited and the derived errors of the method are small. The used technique allows to reduce in considerable form the systematic errors coming from the calibration of the equipment. It is considered that this method is applicable in an interval of thickness quite wide and for many materials since it is only necessary to choose the projectile type and the energy of the same one appropriately. (Author)

Availability note (English)

Available from INIS in electronic form

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Additional details

Additional titles

Original title (Spanish)
Medicion del grosor de un blanco depositado en un substrato

Publishing Information

Imprint Pagination
17 p.
Report number
ACEL--9037

Optional Information

Secondary number(s)
INIS-MX-RI--0171