Published 1981 | Version v1
Report

On the accumulation of hydrocarbons on the targets surfaces by ion bombardment

Description

Hydrocarbon contamination of nickel and silicon surface layers under helium ion bombardment is studied. It is shown.experimentally that contributions of impurities included in the impinged ion beam are negligibly small and the main contamination source is hydrocarbon adsorption and polymerization on the bombarded surface. The method of sample irradiation is proposed allowing hydrocarbon contamination of the surface under ion bombardment in poor vacuum conditions to be eliminated completely

Additional details

Additional titles

Original title (Russian)
К вопросу о накоплении углеводородов на поверхностях мишеней при ионной бомбардировке
Augmented title (English)
Ni, Si

Publishing Information

Imprint Title
Radiation damage physics and radiation material science
Journal Issue
no. 3(17
Series
Voprosy atomnoj nauki i tekhniki.
Journal Page Range
p. 90-93.
Report number
KFTI--81-51

Conference

Title
All-union conference on radiation physics of solids.
Dates
24 - 27 Feb 1981.
Place
Zvenigorod (USSR).

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
14727487
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ADSORPTION; FLUX DENSITY; HELIUM IONS; HIGH VACUUM; HYDROCARBONS; IMPURITIES; KEV RANGE 100-1000; NICKEL; PHYSICAL RADIATION EFFECTS; PRESSURE DEPENDENCE; SILICON; SURFACES; TARGETS
Descriptors DEC
CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; ORGANIC COMPOUNDS; RADIATION EFFECTS; SEMIMETALS; TRANSITION ELEMENTS

Optional Information

Notes
10 refs.; 3 figs. Imprint:Fizika radiatsionnykh povrezhdenij i radiatsionnoe materialovedenie.