Published April 2015 | Version v1
Journal article Metadata-only

Model based control of dynamic atomic force microscope

Creators

  • 1. Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, Seoul 139-743 (Korea, Republic of)
  • 2. Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)

Description

A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments

Additional details

Identifiers

DOI
10.1063/1.4917301;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
86
Journal Issue
4
Journal Page Range
p. 043703-043703.8
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
46098155
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
AMPLITUDES; ATOMIC FORCE MICROSCOPY; CONTROL THEORY; DESIGN; OSCILLATIONS
Descriptors DEC
MICROSCOPY

Optional Information

Notes
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