Published June 15, 2011 | Version v1
Journal article

High-resolution hard-x-ray microscopy using second-order zone-plate diffraction

  • 1. Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439 (United States)
  • 2. National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973 (United States)
  • 3. Institute of Physics, Academia Sinica, Taipei 115, Taiwan (China)
  • 4. Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland)

Description

Odd-order diffraction of zone plates (ZPs) is already used for x-ray microscopy but the potential offered by even-order diffraction must still be fully exploited. Width differences between lines and interline spaces transfer intensity from odd-order to even-order diffractions. Here we show that the resulting intense second-order diffraction provides a reasonable tradeoff between spatial resolution and intensity-and constitutes a viable strategy for x-ray microscopy to reach sub-20 nm resolution, in spite of the imperfections of high-aspect-ratio ZPs and of other difficulties. (fast track communication)

Availability note (English)

Available from http://dx.doi.org/10.1088/0022-3727/44/23/232001

Additional details

Identifiers

DOI
10.1088/0022-3727/44/23/232001;
PII
S0022-3727(11)82147-9;

Publishing Information

Journal Title
Journal of Physics. D, Applied Physics
Journal Volume
44
Journal Issue
23
Journal Page Range
[4 p.]
ISSN
0022-3727
CODEN
JPAPBE