Published March 1989 | Version v1
Journal article

Crystallinity and morphology of superconducting thin films prepared by sputtering

  • 1. Sumitomo Electric Industries Ltd., Itami, Hyogo (Japan). Itami Research Labs.

Description

HoBaCuO superconducting thin films were prepared on MgO substrates by rf magnetron sputtering. The crystallinity and morphology of the thin films have been investigated. An amorphous thin films was crystallized by postannealing at 900degC, while an epitaxial grown thin film was obtained by substrate heating at more than 600degC. (author)

Additional details

Publishing Information

Journal Title
Japanese Journal of Applied Physics, Part 2
Journal Volume
28
Journal Issue
3
Series
Jpn. J. Appl. Phys., Part 2.
Journal Page Range
L441-L443
ISSN
0021-4922
CODEN
JAPLD