A target chamber for ion implantation and ion beam analysis

A stainless-steel target chamber for ion implantation and ion beam analysis in-situ, like RBS, channelling and charged particle reactions, is described. A 3-axis precise goniometer with 2-dimension parallel movements and two Au-Si surface barrier detectors with different solid angles have been istalled in the chamber. The target chamber has a good base pressure, no evidence of oil contamination, quick sample replacement and high efficiency for various ion beam analysis. Those have been demonstrated by the experiences of four years utilization