Published 1986 | Version v1
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Thin film surface treatment by pulsed electron beam

  • 1. Slovenska Akademia Vied, Bratislava (Czechoslovakia). Elektrotechnicky Ustav
  • 2. Joint Inst. for Nuclear Research, Dubna (USSR). Dept. of New Acceleration Methods

Description

A method of thin film surface treatment by the pulsed electron beam fusion is proposed and demonstrated in the paper. The results of the method for the film specimen of the superconductor structure A15(Nb3Ge) are given. It is shown that the treatment results, sufficiently improving the surface structure, don't make worse the film superconductor parameters. The results of the film diffraction analysis are given too

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Additional details

Additional titles

Original title (Russian)
Обработка поверхности тонких пленок импульсным электронным пучком

Publishing Information

Imprint Pagination
6 p.
Report number
JINR-R--13-86-860

Optional Information

Notes
10 refs.; 3 figs.; submitted to the journal Zh. Tekh. Fiz.