Study of Ion Beam Sputtering using Different Materials

In this paper, the electrical discharge and output ion beam characteristics of cold conical cathode ion source were measured at the optimum operating conditions and different pressures using argon gas. The effect of negative extraction voltage applied on the ion collector plate on the output ion beam current was measured at electrical discharge current equal to 1 mA and different pressures using argon gas. It was found that the output ion beam current increases about 75 % its initial values at extraction voltage equal to -1400 volt. The efficiency of the ion source was determined at electrical discharge current equal to 1.2 mA and different argon gas pressures without and with effect of negative extraction voltage applied on the ion collector plate. It was found that at pressure equal to 4 x 10-4 mmHg, the efficiency of the ion source reaches 21.25 % without extraction voltage and 37.5 % at extraction voltage equal to -1400 volt. The sputtering rate of copper and aluminum targets using argon ion beam was calculated without and with effect of negative extraction voltage. A comparison was made between the sputtering rate values of copper and aluminum targets without extraction voltage and with applied extraction voltage on each target equal to -1400 volt. It was found that at pressure equal to 4 x 10-4 mmHg and extraction voltage equal to -1400 volt, the sputtering rate values of copper and aluminum targets increases about 125 % than that the sputtering rate values without extraction voltage.