Published 1973
| Version v1
Journal article
Ion implantation equipment
Creators
- 1. Ceske Vysoke Uceni Technicke, Prague (Czechoslovakia). Fakulta Jaderna a Fysikalne Inzenyrska
Description
The physical and design configuration is described of an equipment for ion implantation. Its fundamental part consists of a duoplasmatron with an additional ionization chamber. The equipment is designed for experimental efforts in the field of ion implantation. A modular construction makes possible the replacement of any part and also the reconstruction of the entire assembly. (J.K.)
Additional details
Additional titles
- Original title (Czech)
- Zarizeni pro iontovou implantaci
Publishing Information
- Journal Title
- Acta Polytech. IV (Prague)
- Journal Issue
- no. 4
- Series
- Acta Polytech. IV (Prague).
Conference
- Title
- Scientific conference of the Czech Technical University.
- Dates
- 12 Jun 1973.
- Place
- Prague, Czechoslovakia.
INIS
- Country of Publication
- Serbia and Montenegro
- Country of Input or Organization
- Serbia and Montenegro
- INIS RN
- 7225696
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DUOPLASMATRONS; ELECTROSTATIC ACCELERATORS; ION IMPLANTATION; IONIZATION
- Descriptors DEC
- ACCELERATORS; ELECTRON TUBES; ION SOURCES; PLASMATRONS