Published 1973
| Version v1
Book
Sputtering of oxides. I. A Survey of the experimental results
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Gordon and Breach, Science Publishers, Inc.
- Imprint Place
- New York
- Imprint Title
- Ion surface interaction, sputtering, and related phenomena
- Imprint Pagination
- p. 37-46.
Conference
- Title
- International conference of ion surface interaction, sputtering and related phenomena.
- Dates
- 24 Sep 1972.
- Place
- Munich, F.R. Germany.
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 6193004
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BIBLIOGRAPHIES; MOLYBDENUM OXIDES; NIOBIUM OXIDES; OXIDES; REVIEWS; SPUTTERING; TANTALUM OXIDES; TEMPERATURE DEPENDENCE; TUNGSTEN OXIDES; URANIUM DIOXIDE; VANADIUM OXIDES; ZIRCONIUM OXIDES
- Descriptors DEC
- ACTINIDE COMPOUNDS; CHALCOGENIDES; DOCUMENT TYPES; MOLYBDENUM COMPOUNDS; NIOBIUM COMPOUNDS; OXYGEN COMPOUNDS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS; URANIUM COMPOUNDS; URANIUM OXIDES; VANADIUM COMPOUNDS; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- Imprint:See CONF-7209125--.