Published 2021
| Version v1
Book
Diagnostics of positive and negative ion fluxes in the reactive magnetron sputtering process
- 1. NIYaU «MIFI», Moscow (Russian Federation)
- 2. Inst. Radiotekhniki i Ehlektroniki im. V.A. Kotel'nikova RAN, Fryazino (Russian Federation)
- 3. NITs «Kurchatovskij Inst.», Moscow (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Диагностика потоков положительных и отрицательных ионов в процессах реакционного магнетронного распыления
Publishing Information
- Publisher
- ZAO NTTs PLAZMAIOFAN
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 978-5-6042115-4-0
- Imprint Title
- XLVIII International Zvenigorod conference on plasma physics and controlled fusion ICPAF-2021. Book of abstracts
- Imprint Pagination
- 246 p.
- Journal Page Range
- p. 156
Conference
- Title
- 48. International Zvenigorod conference on plasma physics and controlled fusion
- Original Conference Title
- XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021
- Acronym
- ICPAF-2021
- Dates
- 15-19 Mar 2021
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 53111185
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ALUMINIUM; ARGON; BINARY MIXTURES; CONCENTRATION RATIO; ELECTRIC DISCHARGES; EXPERIMENTAL DATA; MAGNETRONS; MASS SPECTROMETERS; OXYGEN; PLASMA ARC SPRAYING; QUANTITATIVE CHEMICAL ANALYSIS; SPUTTERING; TARGETS; ZIRCONIUM
- Descriptors DEC
- CHEMICAL ANALYSIS; DATA; DEPOSITION; DIMENSIONLESS NUMBERS; DISPERSIONS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FLUIDS; GASES; INFORMATION; MEASURING INSTRUMENTS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MIXTURES; NONMETALS; NUMERICAL DATA; PLASMA TECHNOLOGY; RARE GASES; SPECTROMETERS; SPRAY COATING; SURFACE COATING; TRANSITION ELEMENTS
Optional Information
- Notes
- 3 refs., 1 fig. Imprint:XLVIII Mezhdunarodnaya Zvenigorodskaya konferentsiya po fizike plazmy i upravlyaemomu termoyadernomu sintezu ICPAF-2021. Sbornik tezisov dokladov