Published 1990
| Version v1
Book
The study of the affects of X-ray and electron-beam radiation on poly(4-t-butoxycarbonyloxystyrene-sulfone)
Creators
- 1. AT and T Bell Labs., Murray Hill, NJ (United States)
Description
The two component system consisting of poly(4-t-butoxycarbonyloxystyrene-sulfone) (TBSS) and an acid generating species (AGS) has been shown to function as a deep-UV resist. However, unlike what is observed with deep-UV radiation TBSS, in the absence of the AGS, is found to function as an X-ray and/or electron-beam chemically amplified resist. The degree of amplification is shown to be a function of the composition of the polymer (ratio of sulfur dioxide to t-boc-oxy-styrene). A radiation induced thermally assisted reaction mechanism describing the self conversion of TBSS to poly(4-hydroxystyrene-sulfone) is presented
Additional details
Publishing Information
- Publisher
- American Chemical Society.
- Imprint Place
- Washington, DC (United States)
- Imprint Title
- American Chemical Society. Division of Polymer Chemistry, Inc.
- Imprint Pagination
- 124 p.
- Journal Page Range
- p. 113, Paper POLY 355.
Conference
- Title
- 200. American Chemical Society (ACS) national meeting.
- Dates
- 26-31 Aug 1990.
- Place
- Washington, DC (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 23077940
- Subject category
- S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMPLIFICATION; CHEMICAL COMPOSITION; CHEMICAL PREPARATION; CHEMICAL REACTION KINETICS; ELECTRON BEAMS; FAR ULTRAVIOLET RADIATION; MASKING; POLYMERS; RADIATION EFFECTS; X RADIATION
- Descriptors DEC
- BEAMS; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; KINETICS; LEPTON BEAMS; PARTICLE BEAMS; RADIATIONS; REACTION KINETICS; SYNTHESIS; ULTRAVIOLET RADIATION
Optional Information
- Secondary number(s)
- CONF-900802--.