Preliminary design of SSRF micro-NEXAFS soft X-ray beamline

In the present design, the selected photon energy range is 250-750 eV which covers the K edge of C, N, O, F and the L edge of transition elements up to Fe. The nominal spatial resolution is 50-150 nm and there is also potential to 30 nm. Special consideration was paid to the transportation of coherent flux and phase-space matching in horizontal and vertical directions. The concept of redundant illumination is introduced to ensure the coherent illumination of zone plate and reduce the effect of source instability and element vibration. The designed flux output is 109 phs/(s·0.1% BW). The nominal spectral resolution (E/ΔE) is 3000, and can be adjusted according to different experimental requirements. The experimental station is designed to enable the sample staying in vacuum, helium and atmosphere