Published October 31, 2005
| Version v1
Journal article
On An RF Discharge With An Adaptive Electrode For Powder Treatment
- 1. Institute of Non-thermal Plasma Physics (INP) Greifswald, F.-L.-Jahn-Str. 19, D-17489 Greifswald (Germany)
Description
The plasma near an adaptive electrode of an asymmetric capacitively coupled RF discharge (13.56 MHz) in argon for powder treatment was studied at different pressures and RF powers. The plasma parameters as electron density, electron temperature, and plasma potential were determined by means of Langmuir probe measurements. The different ions and their kinetic energy at the wall were measured by energy resolved mass spectrometry. The influence of biased segments on the plasma, on the positioning of melamin formaldehyde (MF) particles, and on their vertical resonance frequency was investigated
Additional details
Identifiers
- DOI
- 10.1063/1.2134652;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 799
- Journal Issue
- 1
- Journal Page Range
- p. 411-414
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 4. international conference on the physics of dusty plasmas
- Dates
- 13-17 Jun 2005
- Place
- Orleans (France)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37038248
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON; ASYMMETRY; ELECTRODES; ELECTRON DENSITY; ELECTRON TEMPERATURE; FORMALDEHYDE; HIGH-FREQUENCY DISCHARGES; IONS; KINETIC ENERGY; LANGMUIR PROBE; MASS SPECTROSCOPY; MHZ RANGE; PLASMA; PLASMA DIAGNOSTICS; PLASMA POTENTIAL; PLASMA SHEATH; POWDERS; RESONANCE
- Descriptors DEC
- ALDEHYDES; CHARGED PARTICLES; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRIC PROBES; ELEMENTS; ENERGY; FLUIDS; FREQUENCY RANGE; GASES; NONMETALS; ORGANIC COMPOUNDS; PROBES; RARE GASES; SPECTROSCOPY
Optional Information
- Notes
- (c) 2005 American Institute of Physics