Published October 31, 2005 | Version v1
Journal article

On An RF Discharge With An Adaptive Electrode For Powder Treatment

  • 1. Institute of Non-thermal Plasma Physics (INP) Greifswald, F.-L.-Jahn-Str. 19, D-17489 Greifswald (Germany)

Description

The plasma near an adaptive electrode of an asymmetric capacitively coupled RF discharge (13.56 MHz) in argon for powder treatment was studied at different pressures and RF powers. The plasma parameters as electron density, electron temperature, and plasma potential were determined by means of Langmuir probe measurements. The different ions and their kinetic energy at the wall were measured by energy resolved mass spectrometry. The influence of biased segments on the plasma, on the positioning of melamin formaldehyde (MF) particles, and on their vertical resonance frequency was investigated

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
799
Journal Issue
1
Journal Page Range
p. 411-414
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
4. international conference on the physics of dusty plasmas
Dates
13-17 Jun 2005
Place
Orleans (France)

Optional Information

Notes
(c) 2005 American Institute of Physics