Published 2001 | Version v1
Journal article Metadata-only

Etching of metal surface in argon plasma

Creators

  • 1. NNTs 'Khar'kovskij fiziko-tekhnicheskij institut', Khar'kov (Ukraine)

Description

The treatment process of a metals surface in the dependent high-frequency induction discharge of argon is investigated. The dependence of an etching velocity of Mo, W, Ta and steel Cr18ni10ti from a chamber pressure in the induction discharge power and a potential on a substrate is determined

Additional details

Additional titles

Original title (Russian)
Травление поверхности металлов в плазме аргона

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki. Fizika Radiatsionnykh Povrezhdenij i Radiatsionnoe Materialovedenie
Journal Issue
no.2
Journal Page Range
p. 114-115
ISSN
0134-5400
CODEN
VAFMDP

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
33024644
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON; ELECTRON DENSITY; ELECTRON TEMPERATURE; ETCHING; HIGH-FREQUENCY DISCHARGES; MOLYBDENUM; PRESSURE DEPENDENCE; STEEL-CR18NI10TI; SURFACE TREATMENTS; TANTALUM; TUNGSTEN
Descriptors DEC
ALLOYS; AUSTENITIC STEELS; CHROMIUM ALLOYS; CHROMIUM-NICKEL STEELS; CORROSION RESISTANT ALLOYS; ELECTRIC DISCHARGES; ELEMENTS; FLUIDS; GASES; HEAT RESISTANT MATERIALS; HEAT RESISTING ALLOYS; HIGH ALLOY STEELS; IRON ALLOYS; IRON BASE ALLOYS; MATERIALS; METALS; NICKEL ALLOYS; NONMETALS; RARE GASES; REFRACTORY METALS; STAINLESS STEELS; STEELS; SURFACE FINISHING; TITANIUM ADDITIONS; TITANIUM ALLOYS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENTS