Published 2012
| Version v1
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On possibility of development of thermosensitive structures by phosphorus and boron ion implantation
- 1. Tashkentskij Gosudarstvennyj Tekhnicheskij Univ., Tashkent (Uzbekistan)
Description
no abstract available
Files
45105136.pdf
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Additional details
Additional titles
- Original title (Russian)
- О возможности создания термочувствительных структур имплантацией ионов фосфора и бора в кремний
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLII International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 222 p.
- Journal Page Range
- p. 166
- Report number
- INIS-RU--536
Conference
- Title
- 42. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2012
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 45105136
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ANNEALING; BORON IONS; EXPERIMENTAL DATA; ION IMPLANTATION; KEV RANGE 10-100; MONOCRYSTALS; PHOSPHORUS IONS; P-N JUNCTIONS; SENSITIVITY; SILICON; TEMPERATURE MEASUREMENT; TRANSDUCERS
- Descriptors DEC
- CHARGED PARTICLES; CRYSTALS; DATA; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; INFORMATION; IONS; KEV RANGE; NUMERICAL DATA; SEMICONDUCTOR JUNCTIONS; SEMIMETALS
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XLII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami