Applications of depth profiling by Auger/sputter techniques
Creators
- 1. General Electric Company, Neutron Devices Department, P.O. Box 11508, St. Petersburg, Florida 33733
Description
Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation D. M. Holloway; Applications of depth profiling by Auger/sputter techniques. Journal of Vacuum Science and Technology 1 January 1975; 12 (1): 392–399. https://doi.org/10.1116/1.568799 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science and Technology Search Advanced Search |Citation Search
Additional details
Additional titles
- Augmented title (English)
- Er/Mo interface
Identifiers
- DOI
- 10.1116/1.568799;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology
- Journal Volume
- 12
- Journal Issue
- 1
- Series
- J. Vac. Sci. Technol.
- Journal Page Range
- 392-399
- ISSN
- 0022-5355
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 6190010
- Subject category
- S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ADHESION; ANNEALING; ARGON IONS; AUGER EFFECT; DEPTH DOSE DISTRIBUTIONS; ELECTRON SPECTROSCOPY; ERBIUM; EV RANGE 100-1000; FILMS; INTERFACES; ION BEAMS; MOLYBDENUM; OXIDATION; OXIDES; QUANTITATIVE CHEMICAL ANALYSIS; SPUTTERING; SURFACE PROPERTIES
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CHARGED PARTICLES; CHEMICAL ANALYSIS; CHEMICAL REACTIONS; ELEMENTS; ENERGY RANGE; EV RANGE; HEAT TREATMENTS; IONS; METALS; OXYGEN COMPOUNDS; RADIATION DOSE DISTRIBUTIONS; RARE EARTHS; SPATIAL DOSE DISTRIBUTIONS; SPECTROSCOPY; TRANSITION ELEMENTS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent