Published 1975 | Version v1
Book

Lattice defects in ion-implanted semiconductors

  • 1. Bell Labs., Murray Hill, N.J. (USA)

Description

no abstract available

Additional details

Publishing Information

Publisher
Institute of Physics.
Imprint Place
London
ISBN
0854981136
Imprint Title
Lattice defects in semiconductors, 1974. Invited and contributed papers from the international conference on lattice defects in semiconductors held in Freiburg, 22-25 July 1974
Imprint Pagination
p. 126-148.
Journal Issue
no. 23
Series
Institute of Physics Conference Series.

Conference

Title
International conference on lattice defects in semiconductors.
Dates
22 Jul 1974.
Place
Freiburg, F.R. Germany.

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
6216188
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Bibliography
Descriptors DEI
ANNEALING; CRYSTAL DEFECTS; CRYSTAL LATTICES; ELECTRICAL PROPERTIES; IMPURITIES; ION IMPLANTATION; PHYSICAL RADIATION EFFECTS; REVIEWS; SEMICONDUCTOR MATERIALS; SILICON
Descriptors DEC
CRYSTAL STRUCTURE; DOCUMENT TYPES; ELEMENTS; HEAT TREATMENTS; PHYSICAL PROPERTIES; RADIATION EFFECTS; SEMIMETALS