Published February 15, 2005
| Version v1
Journal article
Metal-organic chemical vapor deposition of indium selenide films using a single-source precursor
- 1. Manchester Materials Science Centre, School of Chemistry, University of Manchester, Oxford Road, Manchester M13 9PL (United KIngdom)
Description
Indium selenide thin films have been deposited on glass, Si(1 0 0) and polycrystalline GaAs substrates from In[(SeP iPr2)2N]2Cl precursor by aerosol-assisted (AA) and low-pressure (LP) metal-organic chemical vapor deposition (MOCVD). X-ray powder diffraction (XRPD) patterns of these films indicated the growth of hexagonal γ-In2Se3. The morphologies of films have been studied by scanning electron microscopy (SEM) and compositions have been determined by energy dispersive analysis of X-rays (EDAX) and X-ray photoelectron spectroscopy (XPS)
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.05.044;
- PII
- S0921-5107(04)00530-6;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 116
- Journal Issue
- 3
- Journal Page Range
- p. 391-394
- ISSN
- 0921-5107
- CODEN
- MSBTEK
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37114420
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- AEROSOLS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; GALLIUM ARSENIDES; INDIUM SELENIDES; MORPHOLOGY; POLYCRYSTALS; PRECURSOR; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RADIATION; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; CHALCOGENIDES; CHEMICAL COATING; COHERENT SCATTERING; COLLOIDS; CRYSTALS; DEPOSITION; DIFFRACTION; DISPERSIONS; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; FILMS; GALLIUM COMPOUNDS; INDIUM COMPOUNDS; IONIZING RADIATIONS; MICROSCOPY; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; RADIATIONS; SCATTERING; SELENIDES; SELENIUM COMPOUNDS; SOLS; SPECTROSCOPY; SURFACE COATING
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.