Published May 2010 | Version v1
Journal article

Hard-X-ray photoelectron diffraction from Si(001) covered by a 0-7-nm-thick SiO2 layer

  • 1. Faculty of Mathematics and Physics, Charles Univ., Prague (Czech Republic)
  • 2. National Inst. for Materials Science, Beamline Station at SPring-8, Sayo, Hyogo (Japan)
  • 3. Japan Synchrotron Radiation Research Inst., SPring-8, Sayo, Hyogo (Japan)
  • 4. Tokyo City Univ., Dept. of Electrical and Electronic Engineering, Tokyo (Japan)

Description

X-ray photoelectron diffraction has become a common method to determine element-specific local atomic surface structure. The use of hard X-rays makes this method bulk-sensitive and capable of studying the atomic structure of new materials such as multilayers and buried layers. We present the first Cr Kα-excited angle-resolved photoelectron diffraction from Si(001) covered by a 0-7-nm-thick SiO2 layer and demonstrate the information depth of this technique. The measured results are compared with a cluster model simulation. (author)

Availability note (English)

Available from http://dx.doi.org/10.1143/APEX.3.056701

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Express
Journal Volume
3
Journal Issue
5
Journal Page Range
p. 056701.1-056701.3
ISSN
1882-0778

Optional Information

Notes
17 refs., 3 figs.