Published May 2010
| Version v1
Journal article
Hard-X-ray photoelectron diffraction from Si(001) covered by a 0-7-nm-thick SiO2 layer
- 1. Faculty of Mathematics and Physics, Charles Univ., Prague (Czech Republic)
- 2. National Inst. for Materials Science, Beamline Station at SPring-8, Sayo, Hyogo (Japan)
- 3. Japan Synchrotron Radiation Research Inst., SPring-8, Sayo, Hyogo (Japan)
- 4. Tokyo City Univ., Dept. of Electrical and Electronic Engineering, Tokyo (Japan)
Description
X-ray photoelectron diffraction has become a common method to determine element-specific local atomic surface structure. The use of hard X-rays makes this method bulk-sensitive and capable of studying the atomic structure of new materials such as multilayers and buried layers. We present the first Cr Kα-excited angle-resolved photoelectron diffraction from Si(001) covered by a 0-7-nm-thick SiO2 layer and demonstrate the information depth of this technique. The measured results are compared with a cluster model simulation. (author)
Availability note (English)
Available from http://dx.doi.org/10.1143/APEX.3.056701Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics Express
- Journal Volume
- 3
- Journal Issue
- 5
- Journal Page Range
- p. 056701.1-056701.3
- ISSN
- 1882-0778
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 42030901
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- BINDING ENERGY; CLUSTER MODEL; CRYSTAL LATTICES; HARD X RADIATION; LAYERS; MONOCRYSTALS; SILICON; SILICON OXIDES; SIMULATION; STRUCTURAL CHEMICAL ANALYSIS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL STRUCTURE; CRYSTALS; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; ELEMENTS; ENERGY; IONIZING RADIATIONS; MATHEMATICAL MODELS; NUCLEAR MODELS; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; RADIATIONS; SCATTERING; SEMIMETALS; SILICON COMPOUNDS; SPECTROSCOPY; X RADIATION
Optional Information
- Notes
- 17 refs., 3 figs.