Published September 2021
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Features of the formation of multicomponent coatings by magnetron sputtering of composite targets
- 1. Institute of physics and technology, National academy of sciences of Belarus, Minsk (Belarus)
Description
The process of deposition of multicomponent Ti-Zr-N coatings using the method of magnetron sputtering of targets of various compositions (TiN+Zr, Ti+Zr) is studied. It is established that the use of a composite target TiN+Zr in reactive magnetron sputtering allows to increase the deposition rate of coatings by reducing the chemisorption of nitrogen by the constituent elements of the target material. The study of the microhardness of coatings of the Ti - Zr - N shows that when the TiN+Zr target is sprayed, Ti-Zr-N coatings are formed, characterized by high microhardness (up to 35 GPa) in a wider range of reaction gas pressures (1.8-2.6×10-2 Pa than when using the Ti+Zr target. (authors)
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Additional details
Additional titles
- Original title (Russian)
- Особенности формирования многокомпонентных покрытий методом магнетронного распыления композиционных мишеней
Publishing Information
- Imprint Place
- Minsk (Belarus)
- Imprint Title
- Interaction of radiation with solids. Proceedings of 14. International conference, dedicated to the 100th anniversary of the Belarusian state university
- Imprint Pagination
- 618 p.
- Journal Page Range
- p. 561-564
- ISSN
- 2706-9060
- Report number
- INIS-BY--108
Conference
- Title
- 14. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 14. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 21 Sep - 24 Sep 2021
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 54123882
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMPOSITE MATERIALS; MAGNETRONS; MICROHARDNESS; NITROGEN; PRESSURE RANGE GIGA PA; SPUTTERING; TITANIUM; TITANIUM NITRIDES; ZIRCONIUM
- Descriptors DEC
- ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; HARDNESS; MATERIALS; MECHANICAL PROPERTIES; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; PRESSURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Notes
- 5 refs., 5 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 14. Mezhdunarodnoj konferentsii, posvyashchennoj 100-letiyu Belorusskogo gosydarstvennogo universitena