Published November 4, 2002
| Version v1
Journal article
Ferroelectric BaPbO3/PbZr0.53Ti0.47/BaPbO3 heterostructures
Creators
- 1. Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan 300 (China)
Description
BaPbO3 (BPO)/PbZr0.53Ti0.47 (PZT)/BPO heterostructures were fabricated by combining the sol-gel and rf-magnetron sputtering techniques. Experimental results indicate that the BPO bottom electrodes effectively prevent the formation of the rosette structure of PZT, producing smooth surfaces. Additionally, ferroelectric, fatigue, and leakage current properties were markedly improved when both the top and the bottom electrodes were changed from Pt to BPO. These improvements are due to a superior electrode/ferroelectric interface. BPO is better than Pt and other oxide electrodes for use in PZT ferroelectric capacitors due to its remarkably improved properties and quite low growth temperature
Additional details
Identifiers
- DOI
- 10.1063/1.1520332;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 81
- Journal Issue
- 19
- Journal Page Range
- p. 3624-3626
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 35017778
- Subject category
- S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- BARIUM COMPOUNDS; FERROELECTRIC MATERIALS; LEAKAGE CURRENT; MAGNETRONS; PZT; SOL-GEL PROCESS; SPUTTERING; THIN FILMS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CURRENTS; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; LEAD COMPOUNDS; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXYGEN COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- (c) 2002 American Institute of Physics.