Published 1995
| Version v1
Book
The interaction potential of microparticles in electrode sheath of rf discharge
Creators
- 1. Inst. of Theoretical and Applied Mechanics, Novosibirsk (Russian Federation)
Description
It is known from experiments that charged open-quote dust close-quote particles in rf discharge form the ordered structure. This work is devoted to definition of the potential of interaction between particles in an strong electrical field of electrode sheath. For study the potential of the particle we use standard approximations of theory of electrode sheath of rf discharge with frequency exceeding the plasma frequency and being less than the electron plasma one. Electrons distribution is assumed to be the Bolzmann one with some temperature Te, and ions move within the averaged over period potential φa, where qi is the rate of ionization being constant within sheath
Additional details
Publishing Information
- Publisher
- Stevens Institute of Technology.
- Imprint Place
- Hoboken, NJ (United States)
- Imprint Title
- XXII International conference on phenomena in ionized gases. Contributed papers 4
- Imprint Pagination
- 256 p.
- Journal Page Range
- p. 61-62.
Conference
- Title
- 22. international conference on phenomena in ionized gases.
- Dates
- 31 Jul - 4 Aug 1995.
- Place
- Hoboken, NJ (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27046200
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CHARGED PARTICLES; ELECTRODES; HIGH-FREQUENCY DISCHARGES; INTERATOMIC FORCES; IONIZATION; PLASMA IMPURITIES; PLASMA SHEATH
- Descriptors DEC
- ELECTRIC DISCHARGES; IMPURITIES
Optional Information
- Secondary number(s)
- CONF-950749--.