Published 1995 | Version v1
Book

The interaction potential of microparticles in electrode sheath of rf discharge

  • 1. Inst. of Theoretical and Applied Mechanics, Novosibirsk (Russian Federation)

Description

It is known from experiments that charged open-quote dust close-quote particles in rf discharge form the ordered structure. This work is devoted to definition of the potential of interaction between particles in an strong electrical field of electrode sheath. For study the potential of the particle we use standard approximations of theory of electrode sheath of rf discharge with frequency exceeding the plasma frequency and being less than the electron plasma one. Electrons distribution is assumed to be the Bolzmann one with some temperature Te, and ions move within the averaged over period potential φa, where qi is the rate of ionization being constant within sheath

Additional details

Publishing Information

Publisher
Stevens Institute of Technology.
Imprint Place
Hoboken, NJ (United States)
Imprint Title
XXII International conference on phenomena in ionized gases. Contributed papers 4
Imprint Pagination
256 p.
Journal Page Range
p. 61-62.

Conference

Title
22. international conference on phenomena in ionized gases.
Dates
31 Jul - 4 Aug 1995.
Place
Hoboken, NJ (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
27046200
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CHARGED PARTICLES; ELECTRODES; HIGH-FREQUENCY DISCHARGES; INTERATOMIC FORCES; IONIZATION; PLASMA IMPURITIES; PLASMA SHEATH
Descriptors DEC
ELECTRIC DISCHARGES; IMPURITIES

Optional Information

Secondary number(s)
CONF-950749--.