Published 1995 | Version v1
Miscellaneous Open

Radiation effects of 20-100 keV deuterium ions in silicon

Creators

  • 1. Tsukuba Univ., Ibaraki (Japan). Inst. of Physics

Description

Short communication

Files

28080474.pdf

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Part of:
Ninth international conference on ion beam modification of materials. Book of abstracts

Additional details

Publishing Information

Publisher
Accademic Press.
Imprint Title
Ninth international conference on ion beam modification of materials. Book of abstracts
Imprint Pagination
452 p.
Journal Page Range
p. 10014.
Report number
INIS-AU--0004

Conference

Title
9. international conference on ion beam modification of materials.
Acronym
IBMM'95
Dates
5-10 Feb 1995.
Place
Canberra (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
28080474
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DEUTERIUM IONS; ION IMPLANTATION; KEV RANGE 10-100; PHYSICAL RADIATION EFFECTS; SILICON; SURFACE PROPERTIES
Descriptors DEC
CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; RADIATION EFFECTS; SEMIMETALS

Optional Information