Published July 1, 1999
| Version v1
Report
LIGA R and D and prototyping
Description
no abstract available
Availability note (English)
Available from (additional information): www.als.lbl.gov/Additional details
Additional titles
- Augmented title (English)
- Lithography, Electroforming, and Assembly
Publishing Information
- Imprint Pagination
- [vp.]
- Report number
- LBNL/ALS--1522
Conference
- Title
- SEMICONWEST
- Dates
- 14 Jul 1999
- Place
- San Francisco, CA (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 33061143
- Subject category
- S43: PARTICLE ACCELERATORS; S42: ENGINEERING;
- Resource subtype / Literary indicator
- Conference, No Abstract, Non-conventional Literature
- Descriptors DEI
- FABRICATION; INTEGRATED CIRCUITS; RESEARCH PROGRAMS; SYNCHROTRON RADIATION; ULTRAVIOLET SPECTROMETERS
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; MEASURING INSTRUMENTS; MICROELECTRONIC CIRCUITS; RADIATIONS; SPECTROMETERS
Optional Information
- Contract/Grant/Project number
- AC03-76SF00098
- Funding organization
- US Department of Energy (United States)