Published November 1996 | Version v1
Journal article Metadata-only

Low- or high-angle Ar ion-beam etching to create ramp-type Josephson junctions

Creators

  • 1. EMAT, University of Antwerp (RUCA), Groenenborgerlaan 171, B-2020 Antwerp (Belgium)
  • 2. Department of Applied Physics, University of Twente, PO Box 217, 7500 AE Enschede (Netherlands)

Description

The dependence of the ramp geometry on high- or low-angle ion-beam etching, used to structure ramp-type Josephson junctions based on ReBa2Cu3O7-δ high-Tc superconductors, is investigated by cross-section transmission electron microscopy. The surface quality, interfaces and crystal defects are analysed by high-resolution electron microscopy. Technical difficulties to reproducibly obtain the desired slope angle and shape make high-angle ion-beam etching less interesting although the surface quality is comparable and no systematic differences in electrical properties are observed. (author)

Availability note (English)

Available online at the Web site for the journal Superconductor Science and Technology (ISSN 1361-6668) http://www.iop/org/

Additional details

Identifiers

URL
http://www.iop/org/;

Publishing Information

Journal Title
Superconductor Science and Technology
Journal Volume
9
Journal Issue
11
Journal Page Range
p. 978-984
ISSN
0953-2048

INIS

Country of Publication
United Kingdom
Country of Input or Organization
Romania
INIS RN
31059317
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ARGON IONS; BARIUM; COPPER; CRYSTAL DEFECTS; ELECTRICAL PROPERTIES; ETCHING; INTERFACES; ION BEAMS; JOSEPHSON JUNCTIONS; OXYGEN; RHENIUM; SURFACES; TRANSMISSION ELECTRON MICROSCOPY
Descriptors DEC
ALKALINE EARTH METALS; ALLOYS; BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; ELEMENTS; IONS; METALS; MICROSCOPY; NONMETALS; PHYSICAL PROPERTIES; REFRACTORY METALS; SEMICONDUCTOR JUNCTIONS; SUPERCONDUCTING JUNCTIONS; SURFACE FINISHING; TRANSITION ELEMENTS