Vertically integrated electronic x-ray imager

Radiographic imaging can be used for medical and nondestructive evaluation applications. Currently the systems used for such testing utilize radiographic film and image intensifiers that limit their utility. X-ray energies used for this type of testing are from 50 keV to 500 keV. Exposure times range from 30 ms to 30 sec and the required resolution is 5 to 10 line-pairs/mm. Because x-rays are not readily focusable, it is necessary to fabricate large area sensing arrays to image large objects. Development of large arrays using existing semiconductor fabrication techniques presents a challenging problem that requires a novel approach for solution. General Imaging Corp. has developed an Electronic X-ray Imaging Technology (EXIT) which includes a design employed to fabricate large area solid-state x-ray imaging arrays. These arrays are vertically integrated multi-chip modules which have the potential to replace both film and real-time imaging modalities in industrial and medical radiography. The EXIT large-area sensing array is configured to resemble a screened film cassette in size and shape so that adaptation to existing radiographic imaging equipment is facilitated