The dislocation density and twin-boundary frequency determined by X-ray peak profile analysis in cold rolled magnetron-sputter deposited nanotwinned copper

The dislocation density and the average twin boundary frequency is determined quantitatively in as-deposited and cold-rolled nanotwinned Cu thin films by high-resolution X-ray line profile analysis. After cold-rolling the dislocation density increases considerably, whereas the twin boundary frequency decreases only slightly. The physical parameters of the substructure provided by the quantitative X-ray analysis are in agreement with earlier transmission electron microscopy observations. The flow stress of the as-deposited and the cold-rolled films is directly correlated with the average thickness of twin lamellae and the dislocation density by taking into account the Hall-Petch and Taylor type strengthening mechanisms.