An improved method for double-sided moulding of PDMS

We describe a special moulding technology of PDMS (polydimethylsiloxane), referred to here as double-sided moulding of PDMS. This technology enables the moulding of PDMS between two master structures and with it the possibility of generating coplanar surfaces. Moreover, it allows the moulding of PDMS with a defined intermediate membrane layer thickness. This makes double-sided moulding of PDMS an advantageous technology applicable in the fields of microtechnology, particularly in microfluidics and microoptics. Depending on the application, the master structures used in this process can be patterned or non-patterned. Furthermore, we present a post-process step that enables the removal of PDMS residues, which still remain after demoulding due to capillary forces. This step is able to provide through-hole structures in a single PDMS layer. Eventually we show some application possibilities