Dynamic modeling and sensitivity analysis of dAFM in the transient and steady state motions

In this paper, based on the slow time varying function theory, dynamical equations for the amplitude and phase of the dynamic atomic force microscope are derived. Then, the sensitivity of the amplitude and phase to the dissipative and conservative parts of interaction force is investigated. The most advantage of this dynamical model is the ability to simulate and analysis the dynamics behavior of amplitude and phase of the AFM tip motion not only in the steady state but also in the transient regime. Using numerical analysis the transient and steady state behavior of amplitude and phase is studied and the sensitivity of amplitude and phase to the interaction force is analyzed. - Highlights: • Dynamic analysis of amplitude and phase of AFM. • Study the transient response of cantilever signal. • Sensitivity of amplitude and phase to the interaction force are analyzed.