Published 1974 | Version v1
Report Restricted

Gold doping of silicon by means of ion implantation

  • 1. Allgemeine Elektricitaets-Gesellschaft AEG Telefunken, Ulm (F.R. Germany)
  • 2. Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V., Freiburg im Breisgau (F.R. Germany). Inst. fuer Angewandte Festkoerperphysik

Description

no abstract available

Availability note (English)

MF available from INIS under the Report Number.

Files

Restricted

The record is publicly accessible, but files are restricted to users with access.

Additional details

Additional titles

Original title (German)
Gold-Dotierung von Silicium mittels Ionenimplantation

Publishing Information

Imprint Pagination
11 p.
Report number
AED-Conf--74-089-010

Conference

Title
Spring meeting of the Arbeitskreis Festkoerperphysik of the Deutsche Physikalische Gesellschaft e.V.
Dates
1 Apr 1974.
Place
Freudenstadt, F.R. Germany.

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
5149436
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; COMPUTER CALCULATIONS; CRYSTAL DOPING; DIFFUSION; DISTRIBUTION; DOPED MATERIALS; GOLD; ION IMPLANTATION; SILICON; SOLUBILITY; VACANCIES
Descriptors DEC
CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELEMENTS; HEAT TREATMENTS; METALS; POINT DEFECTS; SEMIMETALS; TRANSITION ELEMENTS

Optional Information

Notes
8 figs.