On the quantitative determination of cross sections of ionization of molecules by electronic collisions

It is tested the applicability of formulae for atomic ionization to molecules. The best fit between theoretical and experimental values is given by the formula of Gryzinski. The calculations require the knowledge of the orbital structure. If no detailed information on electronic molecular structure is available, then approximation is attained using the Lotz formula with three fitting parameters. Results are given especially for organic molecules and Cl and F containing etching gases. (author)