Deposition of CrSiN/AlTiSiN nano-multilayer coatings by multi-arc ion plating using gas source silicon

Quinary CrAlTiSiN coatings have been prepared on cemented carbide and Si substrates using Cr and AlTi (67:33 at.%) alloy targets in the mixture flow of N2 and SiH4 gas by multi-arc ion plating method. X-ray diffraction and transmission electron microscopy revealed that the multi-element coatings had a nc-CrSiN/nc-AlTiSiN multilayered structure with a thickness period of 10 nm. The microhardness and wear of the coatings were found to be strongly influenced by SiH4 flow rate. The hardness increased monotonically with the increase of SiH4 flow rate and reached 37 GPa at 23 sccm. The coatings exhibit friction coefficients varying between 0.58 and 0.76 against Si3N4 ball