Electrical properties of vanadium films

The electrical properties of vanadium films were examined in a vacuum (p approximately 10-8-1010 Torr) in situ. The films were evaporated onto a molybdenum glass substrate in a vacuum (p=10-7 Torr) by means of an electron gun. The resistivity of the films as a function of temperature was examined during annealing and cooling. It was observed that the resistivity of the annealed films was linearly dependent on the temperature. A non-linear growth in the resistivity which was observed during annealing in a vacuum at temperatures higher than 450 K is due to gas absorption. The annealing and gas absorption processes induce significant changes in the temperature coefficient of the film resistivity. (Auth.)