Barium Strontium Titanate Thin Film Growth with rotational speed variation as a satellite temperature sensor prototype

Barium Strontium Titanate(BST) is a promising material for sensor devices such as temperature and infrared sensor. Ba_xSr_1-xTiO₃ thin films with affordable Si substrate were prepared by chemical solution deposition method and spin coating technique for 30 seconds with variation in rotation speed (3000 rpm, 5500 rpm and 8000 rpm). A high baking temperature at 850⁰C has been used for 15 hours during the annealing process. The thickness of BST film was calculated via gravimetric calculation. USB 2000 VIS-NIR was used to characterize the optical properties of BST thin film. The obtained reflectance curve showed that the most reflected wavelengths were in the range of 408-452 nm respectively. The result of the optical film characterization is very important for further development as a sensor in satellite technology. (paper)