X-ray microscopy

Developments in microscopy using soft x rays (energies between about 100 eV and 2 keV) over the last ten years or so are reviewed. The main advances have been in intense sources, principally synchrotron radiation and plasma sources, and in x-ray optical components such as grazing incidence reflectors, multilayer mirrors and zone plates. The different types of x-ray microscopy are described and images obtained are compared with those from the much better established techniques of electron and optical microscopy. Finally, prospects for the future are discussed. (author)