The influence of the thickness of TiO2 seeding layer on structural and electrical properties of Bi3.15Nd0.85Ti3O12 thin films
Creators
- 1. Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074 (China)
Description
Thin films of Bi3.15Nd0.85Ti3O12(BNT) and BNT with various TiO2 seeding layer thicknesses BNT-Tx (x = 10, 20, 30 nm) were fabricated on Pt/Ti/SiO2/Si substrates by the sol-gel method. The influence of the TiO2 seeding layer thickness on the structural and the electrical properties of BNT thin films was investigated. The x-ray diffraction pattern indicated that the BNT thin film with a TiO2 seeding layer showed a-axis preference orientation. The Pr value was a maximum for the BNT-T20 film and decreased with both decreasing and increasing thickness. The BNT-T20 film had the largest εr and the lowest tanδ. The leakage current density of the BNT thin films with various TiO2 seeding layer thicknesses was generally in the order of 10-6-10-5 A cm-2. The surface micrograph of BNT-Tx films was more homogeneous and dense than that without a seeding layer
Additional details
Identifiers
- DOI
- 10.1088/0022-3727/40/12/034;
- PII
- S0022-3727(07)40584-8;
Publishing Information
- Journal Title
- Journal of Physics. D, Applied Physics
- Journal Volume
- 40
- Journal Issue
- 12
- Journal Page Range
- p. 3788-3792
- ISSN
- 0022-3727
- CODEN
- JPAPBE
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38085840
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BISMUTH COMPOUNDS; ELECTRICAL PROPERTIES; LAYERS; LEAKAGE CURRENT; NEODYMIUM COMPOUNDS; PLATINUM; SILICON OXIDES; SOL-GEL PROCESS; SUBSTRATES; THICKNESS; THIN FILMS; TITANATES; TITANIUM; TITANIUM OXIDES; X-RAY DIFFRACTION
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; CURRENTS; DIFFRACTION; DIMENSIONS; ELECTRIC CURRENTS; ELEMENTS; FILMS; METALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PLATINUM METALS; RARE EARTH COMPOUNDS; SCATTERING; SILICON COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS