Depth profiling of hydrogen by detection of recoiled protons

The elastic recoil detection technique (ERD) using a 2.5 MeV 4He beam for depth profiling of hydrogen in the near-surface regions of solids is described. The optimization of the experimental conditions such as scattering geometry and analyzing beam energy is discussed. The factors limiting the depth resolution of the method have been evaluated showing that a depth resolution of the order of 20 nm can be obtained. Also presented are typical applications for hydrogen profiling in a silicon matrix. (orig.)