Published February 2008
| Version v1
Journal article
Status of ITEP decaborane ion source program
Creators
- Kulevoy, T. V.1, 2, 3, 4, 5
- Petrenko, S. V.1, 2, 3, 4, 5
- Kuibeda, R. P.1, 2, 3, 4, 5
- Seleznev, D. N.1, 2, 3, 4, 5
- Koshelev, V. A.1, 2, 3, 4, 5
- Kozlov, A. V.1, 2, 3, 4, 5
- Stasevich, Yu. B.1, 2, 3, 4, 5
- Sitnikov, A. L.1, 2, 3, 4, 5
- Shamailov, I. M.1, 2, 3, 4, 5
- Pershin, V. I.1, 2, 3, 4, 5
- Hershcovitch, A.1, 2, 3, 4, 5
- Johnson, B. M.1, 2, 3, 4, 5
- Gushenets, V. I.1, 2, 3, 4, 5
- Oks, E. M.1, 2, 3, 4, 5
- Poole, H. P.1, 2, 3, 4, 5
- Masunov, E. S.1, 2, 3, 4, 5
- Polozov, S. M.1, 2, 3, 4, 5
- 1. Moscow Engineering Physics Institute (University), Moscow 115409 (Russian Federation)
- 2. PVI, Oxnard, California 93031-5023 (United States)
- 3. High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055 (Russian Federation)
- 4. Brookhaven National Laboratory, Upton, New York 11973 (United States)
- 5. Institute for Theoretical and Experimental Physics, Moscow 117218 (Russian Federation)
Description
The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented
Additional details
Identifiers
- DOI
- 10.1063/1.2802608;
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 79
- Journal Issue
- 2
- Journal Page Range
- p. 02C501-02C501.4
- ISSN
- 0034-6748
- CODEN
- RSINAK
Conference
- Title
- 12. international conference on ion sources
- Acronym
- ICIS 2007
- Dates
- 26-31 Aug 2007
- Place
- Jeju (Korea, Republic of)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40006398
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANIONS; CATIONS; INDUSTRY; ION BEAMS; ION IMPLANTATION; ION SOURCES; ISOTOPE SEPARATION; MASS; STEADY-STATE CONDITIONS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; IONS; SEPARATION PROCESSES
Optional Information
- Notes
- (c) 2008 American Institute of Physics