Monte Carlo simulation of electron IMFP from elastic backscattering probability

Elastic backscattering probabilities for Fe, Cu, Ag and Au were calculated by Monte Carlo method. The Mott cross-section with Dirac-Hatree-Fock atomic potential was used to describe and calculate the elastic scattering electrons traversing in the solids. A function between assumed values of the electron inelastic mean free path (IMFP) and elastic backscattering probability for normal incidence of the electron beam was given by the Monte Carlo code. With the relation between the elastic backscattering probability and the IMFP in the solid, the IMFPs of Fe, Cu, Ag and Au with electron energy from 100 eV to 2000 eV were determined. And a comparison between the present method and atomic generalized oscillator strength (GOS) model showed that IMFPs calculated by the present method agreed well with those from the GOS model. It is therefore recommended that the M-C simulation be used for determining IMFP when elastic backscattering probability can be correctly measured. (authors)