Published June 2004
| Version v1
Journal article
Study of the discharge characteristic of an unbalanced magnetron sputtering system with an axial solenoid
Creators
- 1. State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian Univ. of Technology, Dalian (China)
Description
The present system is composed of a conventional magnetron and an electrical solenoid by which the unbalanced magnetic field can be changed to variate the plasma state. The experimental results show that the igniting voltage of the system is increased and the discharge voltage is decreased. The discharge efficiency has been favorably improved by varying the electrical solenoid exciting current between 0-4A. The influence of the solenoid is significant when the discharge pressure is less than 0.5Pa. By the Child law the magnetic mirror model has been set up to describe the discharge properties. (author)
Additional details
Publishing Information
- Journal Title
- Nuclear Fusion and Plasma Physics
- Journal Volume
- 24
- Journal Issue
- 2
- Journal Page Range
- p. 141-146
- ISSN
- 0254-6086
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 36071946
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- DEPOSITION; ELECTRIC DISCHARGES; MAGNETIC FIELDS; MAGNETRONS; PLASMA; SOLENOIDS; SPUTTERING
- Descriptors DEC
- ELECTRIC COILS; ELECTRICAL EQUIPMENT; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES
Optional Information
- Notes
- 7 figs., 9 refs.