Preparation of multilayers by alternate cycles of chemical adsorption and electron beam irradiation

Multilayers of ω-nonadecenyl trichlorosilane (V-NTS) have been prepared on SiO2/Al/Si substrates by repeated cycles of chemical adsorption (CA) of V-NTS In solution and activation of terminal double bond by electron beam (EB) irradiation. The terminal double bond facing the outside of a V-NTS monolayer on the substrate reacted to form imino and/or amino groups when the irradiations were carried out in nitrogen atmosphere. This method provides a simple and rapid method of preparing multilayers with fewer defects on a large scale, which is important to the construction of the three-dimensional molecular structure. (author)