AIST nanocharactarization facility (National Institute of Advanced Industrial Science and Technology)

The National Institute of Advanced Industrial Science and Technology (AIST) keeps the AIST Nanocharacterization Facility (ANCF) as a platform for supporting measurement. ANCF participates in both of the TIA's joint research and development facility and the MEXT's nano technology platform / advanced characterization nano technology platform, and is widely responding to measurement requests from all over Japan. The following are introduced: (1) positron probe microanalyzer (PPMA), (2) X-ray absorption fine structure spectroscopy with a superconducting fluorescence detector (SC-XAFS), (3) visible-near infrared transient absorption spectrometer (VITA), (4) real surface probe microscope (RSPM), (5) solid state nuclear magnetic resonance (SSNMR), (6) extreme ultraviolet exited photoelectron spectrometer (EUPS), and (7) scanning electron microscope with a superconducting tunnel junction X-ray detector (SC-SEM). As the examples of measurement, the following are introduced: (1) observation of domains of rubber composite material using RSPM, and development process of semiconductor resist using high-speed AFM in liquid, (2) identification of the poisoning sulfur atom attachment site of zeolite catalyst for NOx selective reduction using EUPS, and (3) trace elemental analysis of heat resistance steel and magnesium trace dopant analysis in gallium nitride using SC-SEM, (A.O.)