Published March 1974
| Version v1
Journal article
Mass-spectrometric study on the conditions of semiconductor amorphous film formation in condensation from vapour phase
Creators
- 1. Kievskij Nauchno-Issledovatel'skij Inst. Mikropriborov (Ukrainian SSR)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Масс-спектрометрические исследования условий образования аморфных пленок полупроводников при конденсации из паровой
Publishing Information
- Journal Title
- Dokl. Akad. Nauk SSSR
- Journal Volume
- 215
- Journal Issue
- 3
- Series
- Dokl. Akad. Nauk SSSR.
- Journal Page Range
- 562-564
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 5147175
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Descriptors DEI
- AMORPHOUS STATE; FILMS; MASS SPECTROSCOPY; MELTING POINTS; POLYCRYSTALS; SEMICONDUCTOR MATERIALS; SUBCOOLING; SUBSTRATES; TEMPERATURE CONTROL; VAPOR CONDENSATION; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- COATINGS; CONTROL; COOLING; CRYSTALS; PHYSICAL PROPERTIES; SPECTROSCOPY; THERMODYNAMIC PROPERTIES; TRANSITION TEMPERATURE