Experimental results of gas avalanche devices made by LIGA process
- 1. KAERI, Taejon (Korea, Republic of)
- 2. Lawrence Berkeley National Lab., Berkeley (United States)
Description
The characteristics of GEM-like gas avalanche devices made by using a deep X-ray lithography technique (LIGA process) have been investigated. The devices described here consist of thin polymethylmethacrylate (PMMA) sheets (1014 Ω/□ surface resistivity), with thin metal surface layers, top and bottom, to serve as electrodes. The sheets are perforated with a grid array of small closely spaced holes. The performance is measured in terms of absolute gain and gain stability as a function of the uniformity of PMMA sheet and as a function of radiation intensity. The short-term gain stability is found to be constant to ∼2%, and the rate capability extends to more than 105 Hz/mm2. Potential advantages of devices made using the LIGA technique will be discussed
Additional details
Publishing Information
- Publisher
- KNS
- Imprint Place
- Taejon (Korea, Republic of)
- Imprint Title
- Proceedings of the Korean Nuclear Society spring meeting
- Imprint Pagination
- [ONE CDROM]
- Journal Page Range
- [7 p.]
Conference
- Title
- 2001 spring meeting of the Korean Nuclear Society
- Dates
- 24-25 May 2001
- Place
- Cheju (Korea, Republic of)
INIS
- Country of Publication
- Korea, Republic of
- Country of Input or Organization
- Korea, Republic of
- INIS RN
- 33040661
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- EQUIPMENT; ETCHING; FABRICATION; GAS DISCHARGE TUBES; MICROSTRUCTURE; MINIATURIZATION; PMMA; RADIATION DETECTORS
- Descriptors DEC
- ELECTRON TUBES; ESTERS; MEASURING INSTRUMENTS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; SURFACE FINISHING
Optional Information
- Notes
- 4 refs, 7 figs