Real-time measurement of implanted deuterons by using the nuclear reaction 2H(d,p)3H

We propose a method for real-time measurement of the density of implanted deuterons in solid materials during deuterium implantation. In this method, the density of implanted deuterons is measured by detecting the emitted protons from the deuteron fusion reaction between the incident deuterons and the implanted deuterons. A negative deuterium beam with an energy of 90 keV is used both for the implanted atoms and a probe beam to measure the implanted deuterons. The density of the implanted deuterium atoms was observed to be drastically different between the single crystal and poly-crystal in Ta